SKU 2026100009

Electrostatic Chuck (ESC) High Voltage DC Power Supply

Part #: 0040-88419

As-is Only 2 left
Price on Request
Manufacturer
Invax Technologies
Warranty
NIL
Inventory
2 units

Specifications

Manufacturer: Invax Technologies
Model / Part Number: 02520-1111
AMAT Cross-Reference Number: 0040-88419
Description: Electrostatic Chuck (ESC) High Voltage DC Power Supply
Maximum Output Voltage: 1000 Vdc
System Application: Applied Materials (AMAT) wafer processing chambers for ESC chucking/dechucking voltage control and wafer presence sensing.

Terms & Conditions