SKU 2026100023

HORIBA STEC SEC-Z534MGX 100 SLM N2 Mass Flow Controller / AMAT 0190-32145

Part #: 0190-32145 (Rev. 001)

As-is Only 2 left
Price on Request
Manufacturer
HORIBA STEC, Co., Ltd.
Warranty
NIL
Inventory
2 units

Specifications

Model Number: SEC-Z534MGX
Applied Materials (AMAT) Part Number: 0190-32145 (Rev. 001)
Gas Calibration: Nitrogen (N2)
Full Scale Flow Rate: 100 SLM (Standard Liters per Minute)
Firmware Version: F.W. 1.1 (Attitude Insensitive, AUTO SHUT)

Terms & Conditions